CMOS-based sensors and actuators

Author

Van Steenkiste, F. ; Maes, D. ; Haspeslagh, L. ; Sedky, S. ; Van Gerwen, P. ; Vandergroen, S. ; Baert, K.

Author_Institution

IMEC, Leuven, Belgium

fYear

1998

fDate

13-16 Sep 1998

Firstpage

393

Lastpage

397

Abstract

In many applications, up to millions of sensors or actuators have to be connected to the outside world, making the monolithic integration of circuits mandatory. Monolithic integration is also pursued for mass-produced transducers. Today, monolithic devices include visible and IR imagers, displays, inkjet heads, biochemical and physical sensors. Monolithic integration of transducer-specific processes (such as micromachining) with standard CMOS processes is possible, albeit at an increase of process complexity

Keywords

CMOS image sensors; CMOS integrated circuits; biosensors; chemical sensors; electric sensing devices; microsensors; CMOS-based sensors; IR imagers; biochemical sensors; displays; inkjet heads; mass-produced transducers; micromachining; monolithic integration; physical sensors; process complexity; transducer-specific processes; visible imagers; Actuators; Biosensors; CMOS process; Displays; Head; Image sensors; Infrared image sensors; Micromachining; Monolithic integrated circuits; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

ASIC Conference 1998. Proceedings. Eleventh Annual IEEE International

Conference_Location

Rochester, NY

ISSN

1063-0988

Print_ISBN

0-7803-4980-6

Type

conf

DOI

10.1109/ASIC.1998.723047

Filename

723047

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1950398