Title :
Scaling low power embedded flash EEPROMs to 0.18um
Author :
Duffy, R. ; Concannon, A. ; Mathewson, A. ; Slotboom, M. ; Dormans, D. ; Wils, N. ; Verhaar, R.
Author_Institution :
National Microelectronics Research Centre, Cork, Ireland
Keywords :
CMOS process; CMOS technology; EPROM; Flash memory; Geometry; Implants; Logic arrays; Microelectronics; Read only memory; Tunneling;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
