Scaling low power embedded flash EEPROMs to 0.18um

Author

Duffy, R. ; Concannon, A. ; Mathewson, A. ; Slotboom, M. ; Dormans, D. ; Wils, N. ; Verhaar, R.

Author_Institution

National Microelectronics Research Centre, Cork, Ireland

Volume

fYear

1999

fDate

13-15 Sept. 1999

Firstpage

620

Lastpage

623

Keywords

CMOS process; CMOS technology; EPROM; Flash memory; Geometry; Implants; Logic arrays; Microelectronics; Read only memory; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location

Leuven, Belgium

Print_ISBN

2-86332-245-1

Type

Filename

1505579

Link To Document