Title :
Low-noise CMOS integrated sensing electronics for capacitive MEMS strain sensors
Author :
Suster, Michael ; Guo, Jun ; Chaimanonart, Nattapon ; Ko, Wen H. ; Young, Darrin J.
Author_Institution :
Dept. of Electr. Eng and Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
This paper describes a high-performance strain sensing microsystem. A MEMS capacitive strain sensor converts an input strain to a capacitance change with a sensitivity of 26.5 aF per 0.1 με. Low-noise integrated sensing electronics, employing a continuous time synchronous detection architecture, convert the capacitive signal to an output voltage for further signal processing. The prototype microsystem achieves a minimum detectable strain of 0.09 με over a 10 kHz bandwidth with a dynamic range of 81 dB. The sensing electronics consume 1.5 mA from a 3 V supply.
Keywords :
CMOS integrated circuits; capacitive sensors; microsensors; signal processing equipment; strain sensors; 1.5 mA; 10 kHz; 3 V; capacitive MEMS strain sensors; continuous time synchronous detection architecture; low-noise CMOS integrated sensing electronics; minimum detectable strain; strain sensing microsystem; Bandwidth; Capacitive sensors; Dynamic range; Electrodes; Fingers; Mechanical sensors; Micromechanical devices; Sensor systems; Sensor systems and applications; Temperature sensors;
Conference_Titel :
Custom Integrated Circuits Conference, 2004. Proceedings of the IEEE 2004
Print_ISBN :
0-7803-8495-4
DOI :
10.1109/CICC.2004.1358922
