Title :
Simulation of the frequency response of a thermal flow sensor in gaseous media
Author :
Reyes-Romero, Diego Fernando ; Urban, Gerald Anton
Author_Institution :
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
Abstract :
The frequency response of a calorimetric flow sensor is simulated for many selected gases. The effect of selected thermal properties of the gas on the frequency response is analyzed. The thermal conductivity is found to be the dominant parameter on the cut-off frequency of the sensor. This influence seems to be linear in nature. Moreover, the influence of the flow speed on the frequency response is also found to be much smaller than that of the thermal conductivity.
Keywords :
calorimeters; flow sensors; frequency response; temperature sensors; calorimetric flow sensor; flow speed influence; frequency response simulation; gas thermal property; gaseous media; sensor cut-off frequency; thermal conductivity; thermal flow sensor; Atmospheric modeling; Heating; Thermal conductivity; Thermistors;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location :
Cascais
Print_ISBN :
978-1-4673-1512-8
DOI :
10.1109/ESimE.2012.6191728
