Title :
Experimental Analysis of the Film Thickness Influence on the Performance of Accumulation-Mode Simox Mosfet´s
Author :
Faynot, O. ; Auberton-Herve, A.-J. ; Cristoloveanu, S.
Author_Institution :
LETI (CEA-Technologies Avancees), France
Keywords :
Annealing; Breakdown voltage; Electrons; MOSFET circuits; Optical films; Performance analysis; Semiconductor films; Temperature; Threshold voltage; Transconductance;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664820