Title :
Micro-machined array probe card
Author :
Beiley, M.A. ; Wong, S.S.
Author_Institution :
Center for Integrated Syst., Stanford Univ., CA, USA
Abstract :
A membrane probe card designed for high speed, high pin count testing has been fabricated with conventional IC technology on a silicon wafer and its functionality demonstrated. A novel method of breaking down interfacial oxide, as a replacement for mechanical scrubbing, is proposed and demonstrated. The probe card can consistently provide contact resistance of <2 Omega , has greatly reduced parasitics, is capable of elevated temperature testing, and offers controlled impedance striplines of 50 Omega to the probe tips.<>
Keywords :
electric sensing devices; integrated circuit testing; membranes; printed circuits; probes; 2 ohm; Si wafer; contact resistance; controlled impedance striplines; conventional IC technology; electrical breakdown; high pin count testing; interfacial oxide; mechanical scrubbing; membrane probe card; micromachined array probe card; probe tips; striplines; Detectors; Integrated circuit testing; Membranes; Printed circuits;
Conference_Titel :
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1992.307412
