Title :
Simox 1992: Materials and Technology
Author_Institution :
Ibis Technology Corporation
Keywords :
Costs; Manufacturing processes; Process control; Silicon; Ultra large scale integration;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664830
