Title :
Complementary, High-Performance Lateral Bjts in a Simox C-Bicmos Technology
Author :
Parke, Stephen A. ; Hu, Chenming ; Ko, Ping K.
Author_Institution :
Department of Electrical Engineering and Computer Science, UC Berkeley
Keywords :
Application software; CMOS process; Implants; Lithography; Logic devices; Logic gates; Substrates; Testing; Voltage; Wafer bonding;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664832
