A novel integrated micro-scale closed synthetic-jet-like flow field as gas lubrication in MEMS devices

Author

Ding, Fei ; Yu, Wenxuan ; Yu, Tingting ; Ni, Chao ; Tang, Ruyan ; Wu, Wengang

Author_Institution

Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

567

Lastpage

571

Abstract

The friction and wear problems have remarkably affected the reliability of Micro-Electro-Mechanical System (MEMS) devices. We present, for the first time, a novel integrated micro-scale closed synthetic-jet-like flow field, which provides a velocity-orientation-constant flow in an enclosure, being available as gas lubrication of the motion parts of MEMS devices to solve the friction problem. Based on a specific pyramid structure we work out, this novel method is applied to a practical rotary electrostatic side drive motor, and is theoretically proved to be effective.

Keywords

friction; jets; lubrication; microfluidics; micromechanical devices; wear; MEMS devices; friction; gas lubrication; integrated microscale closed synthetic-jet-like flow field; microelectromechanical system; microflow field; pyramid structure; rotary electrostatic side drive motor; velocity-orientation-constant flow; wear; Friction; Lubrication; Microelectromechanical devices; Micromechanical devices; Microstructure; Scanning electron microscopy; Self-assembly; Substrates; Surface treatment; Switches; MEMS; friction; micro flow field; synthetic jet;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068644

Filename

5068644