Title :
Design of a multi-walled carbon nanotubes vacuum gauge
Author :
Dong, Ki-Young ; Youngmin ; Moon, Seung-Il ; Lee, Jinwoo ; Choi, Jinnil ; Ju, Byeong-Kwon
Author_Institution :
Coll. of Eng., Korea Univ., Seoul
Abstract :
Measurements of the variation of vacuum level inside of field emission device when electron is emitted from carbon nanotubes (CNT) by electric field were performed. Multi-walled carbon nanotubes (MWCNT) sensor packaged with a vacuum device is used to measure the degree of a vacuum until the end of the vacuum device life. It was found that the electrical properties of MWCNTs altered with the degree of a vacuum. We fabricated MWCNT sensors which were printed and pasted by the screen printer. In this article, we report the successful detection of the ionization of gases in vacuum state.
Keywords :
carbon nanotubes; electric sensing devices; electron field emission; nanotube devices; vacuum gauges; MWCNT sensor; carbon nanotubes; electric field; electron emission; field emission device; multiwalled carbon nanotube vacuum gauge; screen printer; vacuum device; Carbon nanotubes; Chemical vapor deposition; Electron emission; Gases; Glass; Indium tin oxide; Packaging; Powders; Vacuum systems; Vehicles; field emission; multi-walled carbon nanotues; sensor; vacuum gauge;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068654
