Title :
A backstepping controller for piezoelectric actuators with hysteresis in nanopositioning
Author :
Payam, A.F. ; Fathipour, Morteza ; Yazdanpanah, Mohammad Java
Author_Institution :
Device Modelling & Simulation Lab., Univ. of Tehran, Tehran
Abstract :
High precision control and hysteresis compensation are two important factors in nanopositioning. To reduce the tracking error and compensate the hysteresis effect in the piezoelectric actuator, in this paper we present a nanopositioning control scheme for piezoelectric platform. A Bouc-Wen model is established to describe the nonlinear hysteretic effect of the piezoelectric systems. The design of a backstepping controller is explained and its performance is compared with traditional closed loop PID controller.
Keywords :
control system synthesis; hysteresis; nanopositioning; piezoelectric actuators; Bouc-Wen model; backstepping controller design; error tracking reduction; nanopositioning control factor scheme; nonlinear hysteretic effect; piezoelectric actuator; traditional closed loop PID controller; Backstepping; Computational modeling; Computer simulation; Control systems; Error correction; Hysteresis; Nanopositioning; Piezoelectric actuators; Piezoelectric materials; Three-term control; Backstepping control; Nanopositioning; Piezoelectric Actuator; hysteretic effect;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068678
