Title :
Wide-gap athermal Si-slot Mach-Zhender Interferometer embedded with Benzocyclobutene
Author :
Atsumi, Yuki ; Oda, Manabu ; Kang, Joonhyun ; Nishiyama, Nobuhiko ; Arai, Shigehisa
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
An athermal Mach-Zhender Interferometer with wide-gap Si-slot waveguides was demonstrated. This structure is superior in terms of fabrication yield and reproducibility, and the temperature dependence of the wavelengths as small as -0.9 pm/K was achieved.
Keywords :
Mach-Zehnder interferometers; optical fabrication; optical waveguide filters; silicon; Si; athermal Mach-Zehnder interferometer; benzocyclobutene; fabrication yield; slot waveguides; temperature dependence; Large scale integration; Optical device fabrication; Optical filters; Optical interferometry; Silicon; Waveguide discontinuities; Wires; Benzocyclobutene; Mach-Zhender Interferometer; Si photonics; athermal wavelength filter; slot waveguide;
Conference_Titel :
Group IV Photonics (GFP), 2011 8th IEEE International Conference on
Conference_Location :
London
Print_ISBN :
978-1-4244-8338-9
DOI :
10.1109/GROUP4.2011.6053821
