Analytic models of inductively coupled discharges

Summary form only given, as follows. Analytic models for describing electromagnetic properties of low-pressure plasmas driven by radio-frequency currents applied to induction coils are considered. Earlier work has been extended to situations where effects of additional dielectric and conductive media are included. The models provide relatively compact expressions for detailed electromagnetic field distributions so that the power depositions to both plasma and the accompanying conductive medium are determined efficiently. Exact prescriptions for extracting lumped circuit impedance are available. The lumped circuit impedances of the plasma, conductive medium, and induction coil system are also calculated for a wide range of conditions. Implications on extracting plasma parameters from external electrical measurements have been considered.