DocumentCode
1963002
Title
Extraordinary Transmission Through A Poly-SiC Membrane with Subwavelength Hole Arrays
Author
Provine, J.
fYear
2007
fDate
Aug. 12 2007-July 16 2007
Firstpage
157
Lastpage
158
Abstract
We report on the experimental observation of extraordinary transmission (~50% for 25% fill factor) in the infrared through a suspended polycrystalline silicon carbide (poly-SiC) membrane into which is etched a subwavelength hole array. The poly-SiC was deposited by low pressure chemical vapor deposition (LPCVD), patterned with contact photolithography, and etched by reactive ion etching (RIE). Simulation of the mid-infrared transmission is broadly consistent with measurements.
Keywords
chemical vapour deposition; light transmission; micro-optics; optical arrays; photolithography; silicon compounds; sputter etching; LPCVD; RIE; contact photolithography; extraordinary transmission; low pressure chemical vapor deposition; mid-infrared transmission; poly-SiC membrane; polycrystalline silicon carbide membrane; reactive ion etching; subwavelength hole arrays; Biomembranes; Etching; Gratings; Lithography; Optical arrays; Optical films; Optical surface waves; Particle beam optics; Scanning electron microscopy; Silicon carbide; Infra Red Spectroscopy; Optical MEMS; Plasmonics; Silicon Carbide;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location
Hualien
Print_ISBN
978-1-4244-0641-8
Type
conf
DOI
10.1109/OMEMS.2007.4373888
Filename
4373888
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