A Study on Optical Diffraction Characteristics of Skewed MEMS Pitch Tunable Gratings

Author

Takahashi, K. ; Suzuki, K. ; Funaki, H. ; Itaya, K. ; Fujita, H. ; Toshiyoshi, H.

Author_Institution

Univ. of Tokyo, Tokyo

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

175

Lastpage

176

Abstract

This paper presents a pitch tunable grating light valve integrated with high-voltage (40 V) driver circuits that target for image projection display devices. In our work, optical light angle is modulated by changing the period of the MEMS grating pixel by means of electrostatic actuation. In addition, we developed a MEMS grating light valve with a skewed angle for elimination of the inter-spot crosstalk. The skewed gratings were found to spread the +/- 1^st order diffraction off the axis. Optical diffraction angles of 6.6 degrees (OFF-state) and 3.3 degrees (ON-state) were obtained.

Keywords

diffraction gratings; electrostatic actuators; light valves; micro-optomechanical devices; optical crosstalk; optical tuning; electrostatic actuation; image projection display devices; light valve; optical diffraction; pitch tunable gratings; skewed MEMS grating pixel; voltage 40 V; Diffraction gratings; Displays; Driver circuits; Electrostatic actuators; Micromechanical devices; Optical crosstalk; Optical diffraction; Optical modulation; Tunable circuits and devices; Valves; Diffraction gratings; on-chip electronics; pitch tuning; projection display; skewed gratings;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373897

Filename

4373897