Integrated Piezo-resistive Positionssensor for Microscanning Mirrors

Author

Sandner, Thilo ; Conrad, Holger ; Klose, Thomas ; Schenk, Harald

Author_Institution

Fraunhofer Inst. for Photonic Microsyst., Dresden

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

195

Lastpage

196

Abstract

Microscanning mirrors with integrated piezoresistive position sensors are presented. The novel sensor approach is based on intrinsic piezoresistivity of SOI material. It is fully compatible to microscanner technology and requires no additional technological efforts, enabling a cost efficient fabrication process. Integrated 2D position sensors with amplitude sensitivity of Sf= 2.0 mV/V @ 6deg, similar to metallic strain gauges, as well as a good linearity of les 0.5% error of linearity has been realized.

Keywords

micromirrors; microsensors; piezoresistance; piezoresistive devices; position measurement; silicon-on-insulator; strain gauges; 2D position sensors; SOI material; intrinsic piezoresistivity; metallic strain gauges; microscanner technology; microscanning mirrors; piezoresistive position sensor; Capacitive sensors; Costs; Laser feedback; Linearity; Mechanical sensors; Mirrors; Optical device fabrication; Optical feedback; Optical sensors; Piezoresistance; Optical SOI-MEMS; angular sensor; integrated piezo-resistive position sensor; micro scanning mirror;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373907

Filename

4373907