DocumentCode

1964087

Title

Surface Reactions of Tris(oimethylamino) Arsine During Mombe of Gaas

Author

Lu, Jiong Ping ; Salim, Sateria ; Jensen, Klavs F. ; Bohling, David A.

Author_Institution

Departments of Chemical Engineering and Materials, Science and Engineering Massachusetts Institute of Technology

fYear

1992

fDate

8-11 Jun 1992

Firstpage

28

Lastpage

29

Keywords

Bonding; Ducts; Ear; Epitaxial growth; Epitaxial layers; Gallium arsenide; Hydrogen; Nitrogen; Read only memory; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN

0-87942-652-7

Type

conf

DOI

10.1109/MOVPE.1992.664919

Filename

664919