DocumentCode
1964321
Title
Manufacturing issues for 3D integrated active circuits into organic laminate substrates
Author
Jung, Erik ; Wojakowski, Dirk ; Neumann, Alexander ; Ostmann, Andreas ; Aschenbrenner, Rolf ; Reichl, Herbert
Author_Institution
TU Berlin, Germany
fYear
2003
fDate
16-18 July 2003
Firstpage
285
Lastpage
290
Abstract
The three dimensional integration of active circuits, thinned or in standard thickness, into polymeric substrates challenges current substrate manufacturing processes in an unprecedented way. In order to overcome the risks associated with this 3D integration technology, the issues must be carefully studied and assessed. For the direct integration of ultrathin chips into dielectric build up layers of multi-layer printed circuit boards, such issues were identified and put to the test using advanced pcb manufacturing methods. Among the risks encountered in a manufacturing ambient Material selection (i)linear tolerance on a 18×12" board (ii)placement of ultrathin dice (iii)lamination process (iv)laser/plasma via formation (v)electroless deposition of seed layer (vi)patterning of the contact structures (vii)testing voltages were observed to be the ones affecting the outcome and will be discussed.
Keywords
electroless deposition; integrated circuit technology; integrated circuits; printed circuits; 3D integrated active circuits; 3D integration technology; contact structures; electroless deposition; multilayer printed circuit boards; organic laminate substrates; patterning; polymeric substrates; substrate manufacturing processes; testing voltage; ultrathin chips; Active circuits; Circuit testing; Dielectric materials; Dielectric substrates; Integrated circuit manufacture; Integrated circuit technology; Laminates; Manufacturing processes; Polymers; Printed circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 2003. IEMT 2003. IEEE/CPMT/SEMI 28th International
ISSN
1089-8190
Print_ISBN
0-7803-7933-0
Type
conf
DOI
10.1109/IEMT.2003.1225915
Filename
1225915
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