• DocumentCode
    1964321
  • Title

    Manufacturing issues for 3D integrated active circuits into organic laminate substrates

  • Author

    Jung, Erik ; Wojakowski, Dirk ; Neumann, Alexander ; Ostmann, Andreas ; Aschenbrenner, Rolf ; Reichl, Herbert

  • Author_Institution
    TU Berlin, Germany
  • fYear
    2003
  • fDate
    16-18 July 2003
  • Firstpage
    285
  • Lastpage
    290
  • Abstract
    The three dimensional integration of active circuits, thinned or in standard thickness, into polymeric substrates challenges current substrate manufacturing processes in an unprecedented way. In order to overcome the risks associated with this 3D integration technology, the issues must be carefully studied and assessed. For the direct integration of ultrathin chips into dielectric build up layers of multi-layer printed circuit boards, such issues were identified and put to the test using advanced pcb manufacturing methods. Among the risks encountered in a manufacturing ambient Material selection (i)linear tolerance on a 18×12" board (ii)placement of ultrathin dice (iii)lamination process (iv)laser/plasma via formation (v)electroless deposition of seed layer (vi)patterning of the contact structures (vii)testing voltages were observed to be the ones affecting the outcome and will be discussed.
  • Keywords
    electroless deposition; integrated circuit technology; integrated circuits; printed circuits; 3D integrated active circuits; 3D integration technology; contact structures; electroless deposition; multilayer printed circuit boards; organic laminate substrates; patterning; polymeric substrates; substrate manufacturing processes; testing voltage; ultrathin chips; Active circuits; Circuit testing; Dielectric materials; Dielectric substrates; Integrated circuit manufacture; Integrated circuit technology; Laminates; Manufacturing processes; Polymers; Printed circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Manufacturing Technology Symposium, 2003. IEMT 2003. IEEE/CPMT/SEMI 28th International
  • ISSN
    1089-8190
  • Print_ISBN
    0-7803-7933-0
  • Type

    conf

  • DOI
    10.1109/IEMT.2003.1225915
  • Filename
    1225915