Low-loss compact MEMS phase shifter for phased array antennas

Author

Abdellatif, A.S. ; Abdel Aziz, A. ; Mansour, R.R. ; Safavi-Naeini, S.

Author_Institution

Electr. & Comput. Eng. Dept., Univ. of Waterloo, Waterloo, ON, Canada

Volume

51

Issue

15

fYear

2015

fDate

7 23 2015

Firstpage

1142

Lastpage

1144

Abstract

A compact and low-loss MEMS-based phase shifter is proposed for microwave/millimetre-wave phased array antenna systems. The proposed phase shifter is an alumina-based CPW line, loaded with a variable series capacitor. The phase shifter uses an electromagnetic MEMS actuator to change the capacitor value. A simple three-mask surface micromachining process has been developed for device fabrication. The measurements at 26 GHz show a phase shift of 20°. The overall size of the phase shifter (including the actuator) is 0.5 × 1.5 mm. The measured average insertion loss is 0.75 dB with a variation of 0.4 dB for different phase shifts across the band from 24.5 to 26.5 GHz.

Keywords

antenna phased arrays; capacitors; coplanar waveguides; masks; micromachining; micromechanical devices; microwave antenna arrays; microwave phase shifters; millimetre wave antenna arrays; millimetre wave phase shifters; alumina-based CPW line; electromagnetic MEMS actuator; frequency 24.5 GHz to 26.5 GHz; gain 0.4 dB; loss 0.75 dB; low-loss compact MEMS phase shifter; microwave-millimetre-wave phased array antenna system; three-mask surface micromachining process; variable series capacitor;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el.2015.0876

Filename

7163377