Title :
Silicon-on-insulator Bragg gratings fabricated by deep UV lithography
Author :
Wang, Xu ; Shi, Wei ; Vafaei, Raha ; Jaeger, Nicolas A F ; Chrostowski, Lukas
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of British Columbia, Vancouver, BC, Canada
Abstract :
We demonstrate the design and performance of Bragg gratings on silicon-on-insulator waveguides. Two structures for achieving the modulation of the effective index of refraction are described. The grating fabrication is based on deep ultra-violet lithography using a single mask. The thermal tunability of the devices is demonstrated.
Keywords :
Bragg gratings; integrated optics; optical fabrication; optical tuning; optical waveguides; refractive index; silicon-on-insulator; ultraviolet lithography; Bragg gratings; deep ultraviolet lithography; refraction index; silicon-on-insulator waveguides; thermal tunability; Bandwidth; Bragg gratings; Corrugated surfaces; Fabrication; Lithography; Strips; Surface waves;
Conference_Titel :
Communications and Photonics Conference and Exhibition (ACP), 2010 Asia
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-7111-9
DOI :
10.1109/ACP.2010.5682598
