DocumentCode
1969396
Title
Lattice-Matched Growth of lnPSb on lnAs by Low Pressure Plasma-MOVPE
Author
Stoll, B. ; Behet, M. ; Heime, K.
Author_Institution
Institut fur Halbleitertechnik, RWTH Aachen, Deutschland
fYear
1992
fDate
8-11 Jun 1992
Firstpage
76
Lastpage
77
Keywords
Epitaxial growth; Epitaxial layers; Gallium arsenide; Lattices; Plasma materials processing; Plasma properties; Plasma temperature; Solids; Superlattices; Thermal stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.664945
Filename
664945
Link To Document