Title :
Problem and solution of designing an air bearing system
Author :
Tan, Kok Kiong ; Huang, Sunan
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
In this paper, we present the structure and design of an air bearing stage. First, a spherical air bearing system (SABS) is introduced in the alignment of nano-imprinting. Secondly, the eddy current is used to control the SABS over-coming the frictionless motion. Thirdly, an adaptive algorithm is designed for estimating the unknown model parameters. Finally, an experimental platform is setup and the proposed algorithm is tested.
Keywords :
adaptive control; control system synthesis; design engineering; disc drives; eddy currents; hard discs; machine bearings; nanolithography; parameter estimation; adaptive algorithm; eddy current; frictionless motion; hard disk drive; nanoimprint lithography; nanoimprinting; parameter estimation; spherical air bearing system design; Damping; Magnetic devices; Magnetic levitation; Magnetomechanical effects; Performance evaluation; Air bearing systems; adaptive control; eddy current damping; nano-imprinting;
Conference_Titel :
Industrial and Information Systems (IIS), 2010 2nd International Conference on
Conference_Location :
Dalian
Print_ISBN :
978-1-4244-7860-6
DOI :
10.1109/INDUSIS.2010.5565873
