DocumentCode
1969690
Title
Problem and solution of designing an air bearing system
Author
Tan, Kok Kiong ; Huang, Sunan
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Volume
1
fYear
2010
fDate
10-11 July 2010
Firstpage
212
Lastpage
215
Abstract
In this paper, we present the structure and design of an air bearing stage. First, a spherical air bearing system (SABS) is introduced in the alignment of nano-imprinting. Secondly, the eddy current is used to control the SABS over-coming the frictionless motion. Thirdly, an adaptive algorithm is designed for estimating the unknown model parameters. Finally, an experimental platform is setup and the proposed algorithm is tested.
Keywords
adaptive control; control system synthesis; design engineering; disc drives; eddy currents; hard discs; machine bearings; nanolithography; parameter estimation; adaptive algorithm; eddy current; frictionless motion; hard disk drive; nanoimprint lithography; nanoimprinting; parameter estimation; spherical air bearing system design; Damping; Magnetic devices; Magnetic levitation; Magnetomechanical effects; Performance evaluation; Air bearing systems; adaptive control; eddy current damping; nano-imprinting;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial and Information Systems (IIS), 2010 2nd International Conference on
Conference_Location
Dalian
Print_ISBN
978-1-4244-7860-6
Type
conf
DOI
10.1109/INDUSIS.2010.5565873
Filename
5565873
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