DocumentCode
1969941
Title
Memory-Technologies: Pace-Setters for the IC-Industry
Author
Klose, H. ; Dehm, C. ; Mueller, G. ; Scheibe, C. ; Schumann, D. ; Sitaram, A.R.
Author_Institution
Infineon Technologies AG, Germany
fYear
2001
fDate
11-13 September 2001
Firstpage
45
Lastpage
50
Keywords
Capacitors; Circuits; DRAM chips; Dielectric constant; High K dielectric materials; Inverters; Leakage current; Paper technology; Random access memory; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN
2-914601-01-8
Type
conf
DOI
10.1109/ESSDERC.2001.195202
Filename
1506584
Link To Document