Title :
Optimisation of buried channel for 0.1um MOSFETs with mid-gap metal gate
Author :
Tavel, B. ; Josse, E. ; Lenoble, D. ; Julien, C. ; Skotnicki, T.
Author_Institution :
France Telecom, Crolles, France
fDate :
11-13 September 2001
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195223
