Double-Gate MOSFETs: Is Gate Alignment Mandatory?

Author

Allibert, F. ; Zaslavsky, A. ; Pretet, J. ; Cristoloveanu, S.

Author_Institution

LPCS, Grenoble, France and SOITEC S.A., France

fYear

2001

fDate

11-13 September 2001

Firstpage

267

Lastpage

270

Keywords

CMOS technology; Chemical technology; Electronic mail; MOSFETs; Manufacturing; Semiconductor films; Transconductance; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2001. Proceeding of the 31st European

Print_ISBN

2-914601-01-8

Type

DOI

10.1109/ESSDERC.2001.195252

Filename

1506634

Link To Document