Title :
Femtosecond laser irradiation for functional micro-/nanostructure fabrication
Author :
Hong, Minghui ; Chen, Zaichun ; Tang, Min ; Shi, Luping ; Chong, Tow Chong
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning.
Keywords :
high-speed optical techniques; laser beam effects; laser materials processing; microfabrication; nanofabrication; nanostructured materials; polymer films; 3D structures; femtosecond laser irradiation; heat sensitive bio-polymer film; microdevice patterning; micromold; microstructure fabrication; nanofabrication; nanostructuring; size 20 nm; Biomedical optical imaging; Computer numerical control; Glass; Laser beams; Laser theory; Nonlinear optics; Optical device fabrication; Optical films; Substrates; Ultrafast optics; fs laser; microfabrication; nano-engineering;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292198
