Title :
Ultrafast laser micro and nano processing — the state of the art and future perspective
Author_Institution :
Adv. Sci. Inst., RIKEN, Wako, Japan
Abstract :
Over the past few decades, ultrafast laser has become a common tool for micro and nano processing, and is now widely used for both fundamental researches and practical applications. In this lecture, the state of the art and future perspective of ultrafast laser processing are reviewed.
Keywords :
laser materials processing; ultrafast laser microprocessing; ultrafast laser nanoprocessing; ultrafast laser processing; Absorption; Glass; Interference; Laser beams; Nanobioscience; Nanostructures; Optical materials; Optical pulses; Optical waveguides; Spatial resolution; femtosecond laser; micro processing; nano processing; ultrafast laser;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292231
