Title :
Femtosecond laser gratings micromachining on PDMS plates
Author :
Zhu, Linwei ; Zhou, Changhe ; Wu, Tengfei ; Xie, Jin
Author_Institution :
State Key Lab. of High Field Laser Phys., Chinese Acad. of Sci., Shanghai, China
Abstract :
We report on the femtosecond laser miscromachining of diffraction gratings on PDMS (polydimethylsiloxane) plate. By scanning the planar PDMS plate, using the optical X-Y-Z stages, the embedded diffraction gratings in PDMS plate was fabricated successfully.
Keywords :
diffraction gratings; high-speed optical techniques; laser beam machining; micro-optics; micromachining; optical fabrication; optical polymers; PDMS plate; diffraction grating; femtosecond laser grating; femtosecond laser miscromachining; polydimethylsiloxane plate; Biomedical optical imaging; Diffraction gratings; Laser ablation; Micromachining; Optical attenuators; Optical devices; Optical diffraction; Optical polymers; Optical resonators; Ultrafast optics; Femtosecond laser; Gratings; Micromachining; PDMS;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292260
