• DocumentCode
    1973993
  • Title

    An experimental study of atomic vapor cell fabrication for atomic clock

  • Author

    Lv, Qiang ; He, Lu ; Xu, Jian

  • Author_Institution
    Dept. of Math. & Phys., Wuhan Polytech. Univ., Wuhan, China
  • fYear
    2011
  • fDate
    16-18 Sept. 2011
  • Firstpage
    552
  • Lastpage
    554
  • Abstract
    Miniaturized atomic clock could provide the most stable frequency reference. Atomic Vapor Cell is the most important component for atomic clock. A method based on vacuum packaging to conduct the glass-silicon-glass anodic bonding using two electrodes for atomic vapor cell fabrication was developed. Based on the method of laser drilling and surface analysis, a novel process for atomic vapor cell fabrication with cavity by laser drilling was proposed. Tensile strength test shows that the samples could obtain 9 MPa ~ 10 MPa. The spectrum analysis demonstrated the alkali metal was well sealed.
  • Keywords
    atomic clocks; electrodes; frequency measurement; glass; laser beam machining; silicon; tensile strength; atomic oscillators; atomic vapor cell fabrication; electrodes; frequency reference; glass-silicon-glass anodic bonding; laser drilling; miniaturized atomic clock; spectrum analysis; surface analysis; tensile strength test; vacuum packaging; Atomic clocks; Bonding; Glass; Lasers; Silicon; Surface morphology; Surface treatment; atomic clock; atomic vapor cell; laser drilling; multi-stack anodic bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical and Control Engineering (ICECE), 2011 International Conference on
  • Conference_Location
    Yichang
  • Print_ISBN
    978-1-4244-8162-0
  • Type

    conf

  • DOI
    10.1109/ICECENG.2011.6057088
  • Filename
    6057088