DocumentCode
197487
Title
Heterogeneously integrated MIR silicon photonics
Author
Yu Chen ; Hongtao Lin ; Juejun Hu ; Mo Li
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
By utilizing heterogeneous integration method, integrated silicon photonics on mid-IR compatible substrate has been fabricated and on-chip cavity-enhanced mid-IR spectroscopic analysis of organic chemicals has been demonstrated.
Keywords
elemental semiconductors; infrared spectra; infrared spectroscopy; integrated optics; organic compounds; silicon; substrates; Si; heterogeneous integration method; integrated silicon photonics; mid-IR compatible substrate; on-chip cavity-enhanced mid-IR spectroscopic analysis; organic chemicals; Ethanol; Optical ring resonators; Optical waveguides; Silicon photonics; Substrates; System-on-chip;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6990083
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