DocumentCode :
1976085
Title :
Application of an Electrochemical Arsine Generator on High Throughput MOVPE Reactor
Author :
Burk, A.A., Jr.
Author_Institution :
Westinghouse Electric Corporation, Advanced Technology Laboratory, Baltimore, MD
fYear :
1992
fDate :
8-11 Jun 1992
Firstpage :
145
Lastpage :
146
Keywords :
Buffer layers; Character generation; Doping; Epitaxial growth; Epitaxial layers; Gallium arsenide; Inductors; Laboratories; Temperature measurement; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
Type :
conf
DOI :
10.1109/MOVPE.1992.664986
Filename :
664986
Link To Document :
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