Title :
Application of an Electrochemical Arsine Generator on High Throughput MOVPE Reactor
Author_Institution :
Westinghouse Electric Corporation, Advanced Technology Laboratory, Baltimore, MD
Keywords :
Buffer layers; Character generation; Doping; Epitaxial growth; Epitaxial layers; Gallium arsenide; Inductors; Laboratories; Temperature measurement; Throughput;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664986
