Title :
Micromachined W-band Integrated Rectangular Waveguide Filter Utilising SU-8
Author :
Ismail, A. ; Razalli, M.S. ; Mahdi, M.A. ; Darman, W. N I Wan ; Abdullah, R. S A Raja ; Isa, M.M.
Author_Institution :
Dept. of Comput. & Commun. Syst. Eng., Univ. Putra Malaysia, Serdang
Abstract :
This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A W-band micromachined rectangular waveguide filter utilizing SU-8 micromachining with CPW input and output ports has been designed. Simulated frequency responses exhibit insertion loss of 1.18 dB across 1 GHz bandwidth for W-band frequency range centered at 93 GHz with return loss better than -20 dB.
Keywords :
coplanar waveguide components; micromachining; microwave filters; waveguide filters; CPW; SU-8 micromachining; W-band integrated rectangular filter; insertion loss; microwave waveguide filter design; return loss; Band pass filters; Coplanar waveguides; Frequency; Micromachining; Microwave filters; Millimeter wave technology; Planar waveguides; Rectangular waveguides; Resonator filters; Waveguide transitions; coplanar input and output port; micromachined; millimetre-wave filter; rectangular cavity;
Conference_Titel :
Microwave Conference, 2007. APMC 2007. Asia-Pacific
Conference_Location :
Bangkok
Print_ISBN :
978-1-4244-0748-4
Electronic_ISBN :
978-1-4244-0749-1
DOI :
10.1109/APMC.2007.4554831