DocumentCode :
1976620
Title :
Micromachined W-band Integrated Rectangular Waveguide Filter Utilising SU-8
Author :
Ismail, A. ; Razalli, M.S. ; Mahdi, M.A. ; Darman, W. N I Wan ; Abdullah, R. S A Raja ; Isa, M.M.
Author_Institution :
Dept. of Comput. & Commun. Syst. Eng., Univ. Putra Malaysia, Serdang
fYear :
2007
fDate :
11-14 Dec. 2007
Firstpage :
1
Lastpage :
4
Abstract :
This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A W-band micromachined rectangular waveguide filter utilizing SU-8 micromachining with CPW input and output ports has been designed. Simulated frequency responses exhibit insertion loss of 1.18 dB across 1 GHz bandwidth for W-band frequency range centered at 93 GHz with return loss better than -20 dB.
Keywords :
coplanar waveguide components; micromachining; microwave filters; waveguide filters; CPW; SU-8 micromachining; W-band integrated rectangular filter; insertion loss; microwave waveguide filter design; return loss; Band pass filters; Coplanar waveguides; Frequency; Micromachining; Microwave filters; Millimeter wave technology; Planar waveguides; Rectangular waveguides; Resonator filters; Waveguide transitions; coplanar input and output port; micromachined; millimetre-wave filter; rectangular cavity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Conference, 2007. APMC 2007. Asia-Pacific
Conference_Location :
Bangkok
Print_ISBN :
978-1-4244-0748-4
Electronic_ISBN :
978-1-4244-0749-1
Type :
conf
DOI :
10.1109/APMC.2007.4554831
Filename :
4554831
Link To Document :
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