Future silicon technology

Dimensional scaling will continue in Si CMOS technology which will extend to beyond 10nm. Key challenges for dimensional scaling and expansion of silicon-based technologies as well as research directions will be reviewed in traditional semiconductor applications such as DRAM, NAND Flash, logic as well as advanced devices including STT-MRAM, ReRAM and reconfigurable logic. Furthermore, other areas where Si technologies play import roles will be presented including power electronics, solid-state lighting as well as DNA sequencing and medical imaging.