DocumentCode :
1978155
Title :
Structures and Reactions on
Author :
Aspnes, D.E. ; Kamiya, Itaru ; Tanaka, H. ; Bhat, R.
Author_Institution :
Bellcore, Red Bank, N.J.
fYear :
1992
fDate :
8-11 Jun 1992
Firstpage :
172
Lastpage :
172
Keywords :
Epitaxial growth; Epitaxial layers; Gallium arsenide; Hydrogen; Molecular beam epitaxial growth; Semiconductor process modeling; Spectroscopy; Surface contamination; Surface reconstruction; Vacuum technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
Type :
conf
DOI :
10.1109/MOVPE.1992.665000
Filename :
665000
Link To Document :
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