DocumentCode
1978211
Title
Monitoring Surface Coverage and Reconstruction Changes Under GaAs AlAs and InAs MOCVD Conditions Using Reflectance Anisotropy
Author
Armstrong, S.R. ; Hoare, R.D. ; Pemble, M.E. ; Povey, I.M. ; Stafford, A. ; Taylor, A.G. ; Fawcett, P. ; Joyce, B.A. ; Neave, J.H. ; Klug, D. ; Zhang, J.
Author_Institution
Department of Chemistry and Centre for Electronic Materials, UMIST, UK
fYear
1992
fDate
8-11 Jun 1992
Firstpage
177
Lastpage
177
Keywords
Anisotropic magnetoresistance; Condition monitoring; Educational institutions; Gallium arsenide; MOCVD; Real time systems; Reflectivity; Rough surfaces; Surface reconstruction; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.665003
Filename
665003
Link To Document