DocumentCode
1978359
Title
Coupled Gas and Surface Reactions in the OMVPE Cadmium Telluride
Author
McDaniel, A.H. ; Liu, B. ; Hicks, R.F.
Author_Institution
UCLA Chemical Engineering, Los Angeles, CA
fYear
1992
fDate
8-11 Jun 1992
Firstpage
184
Lastpage
185
Keywords
Cadmium compounds; Chemical engineering; Epitaxial growth; Helium; Hydrocarbons; Hydrogen; Inductors; Kinetic theory; Predictive models; Tellurium;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.665009
Filename
665009
Link To Document