DocumentCode

1978454

Title

A Comparison of the as Compounds Tertiarybutylarsine and Monoethylarsine

Author

Neumann, N. ; Hövel, R. ; Heime, K.

Author_Institution

Institut fur Halbleitertechnik, Fed. Rep. of Germany

fYear

1992

fDate

8-11 Jun 1992

Firstpage

193

Lastpage

194

Keywords

Ash; Epitaxial growth; Gallium arsenide; Government; Hydrogen; Liquids; Rough surfaces; Surface morphology; Surface roughness; Temperature control;

fLanguage

English

Publisher

ieee

Conference_Titel

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN

0-87942-652-7

Type

conf

DOI

10.1109/MOVPE.1992.665013

Filename

665013