DocumentCode
1979494
Title
A New Approach for Feedback Control of Radius and Growth Rate in Czochralski (Cz) Processes Exemplarily Studied on LEC-InP
Author
Neubert, M. ; Winkler, J. ; Rudolph, J.
fYear
2006
fDate
7-11 May 2006
Firstpage
144
Lastpage
144
Keywords
Automatic control; Crystals; Feedback control; Geometry; MONOS devices; Mass production; Reproducibility of results; Robust control; Shape control; Three-term control;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials Conference Proceedings, 2006 International Conference on
Print_ISBN
0-7803-9558-1
Type
conf
DOI
10.1109/ICIPRM.2006.1634132
Filename
1634132
Link To Document