DocumentCode
1980296
Title
High precision laser micromachining depths by pulsed ultraviolet and mid-UV Nd:YAG laser of sapphire and silicon for microfluidic applications
Author
Chen, Tai-Chang ; Darling, R. Bruce
Author_Institution
Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
We explore the use of near-UV and mid-UV Nd:YAG laser for rapid micromachining for microfluidic applications. The laser ablation depths and precision on sapphire and silicon have been discussed.
Keywords
laser ablation; laser beam machining; microfluidics; neodymium; precision engineering; sapphire; silicon; solid lasers; ultraviolet sources; Al/sub 2/O/sub 3/; Si; YAG:Nd; YAl5O12:Nd; laser ablation depths; laser micromachining depths; microfluidic; mid-UV Nd:YAG laser; pulsed ultraviolet Nd:YAG laser; sapphire; silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360995
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