Cut-independent quartz resonator micromachining by ion track lithography

The ability of ion track lithography to achieve arbitrary resonator elements in quartz is shown. In X-cut quartz, tuning forks and length extensional resonators have been manufactured, to show the ability by ion track lithography wet etching to micromachine resonators in an otherwise difficult configuration. In AT-cut two kinds of moated resonators have been realized, with the prospect of lowering mounting stresses. The suggestion is that this technology enables low-cost structuring of most lateral geometries in any crystal cut of quartz. Therefore, more stable low-cost BAW resonators can be envisioned