• DocumentCode
    1980992
  • Title

    Body-tied double-gate SONOS flash (omega flash) memory device built on bulk Si wafer

  • Author

    Il Hwan Cho ; Tai-Su Park ; Si Young Choi ; Jong Duk Lee ; Jong-Ho Lee

  • Author_Institution
    Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea
  • fYear
    2003
  • fDate
    23-25 June 2003
  • Firstpage
    133
  • Lastpage
    134
  • Abstract
    In this paper, for the first time, a body-tied double-gate SONOS flash memory device using bulk Si wafer is proposed. Brief fabrication steps and measured characteristics are presented.
  • Keywords
    MIS devices; flash memories; hot carriers; photolithography; MIS devices; SONOS flash memory; Si; Si wafer; channel hot electron injection; omega flash memory; photolithography; silicon-oxide-nitride-oxide-silicon flash memory device; Computer science; Etching; Fabrication; FinFETs; Flash memory; Ion implantation; Materials science and technology; Research and development; SONOS devices; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 2003
  • Conference_Location
    Salt Lake City, UT, USA
  • Print_ISBN
    0-7803-7727-3
  • Type

    conf

  • DOI
    10.1109/DRC.2003.1226904
  • Filename
    1226904
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1980992