Title :
The impact of thermal- and photo-annealing of chalcogenide films for optical waveguides
Author :
Choi, Duk-Yong ; Madden, Steve ; Wang, Rongping ; Luther-Davies, Barry
Author_Institution :
Centre for Ultra-high Bandwidth Devices for Opt. Syst. (CUDOS), Australian Nat. Univ., Canberra, ACT, Australia
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
We applied thermal- and band-edge light annealing on an as-deposited As2S3 film to mitigate its phase separation and, thus to improve the propagation losses of fabricated optical waveguides. Studies of the film micro structure revealed a difference between atomic bonds and linked phases among the as-deposited, thermally-annealed, and optically-annealed films. We fabricated rib-type waveguides with 4 micron width from 0.85 μm thick films, and measured the insertion losses. Around 0.4 and 0.2 dB/cm propagation losses were obtained in the waveguides produced from as-deposited and annealed films, respectively. The waveguides produced from photo-annealed film showed almost the same propagation losses to those from thermally-annealed material. Our results, however, indicate optical-annealing provides some advantages over thermal annealing for waveguide fabrication, such as the absence of film cracking which observed at high temperature processing.
Keywords :
annealing; optical fabrication; optical films; optical losses; optical waveguides; As2S3; annealed films; as-deposited films; atomic bonds; band-edge light annealing; chalcogenide films photo-annealing; chalcogenide films thermal-annealing; film cracking; high temperature processing; insertion losses; optical waveguides; optical-annealing; photo-annealed film; propagation losses; rib-type waveguides; size 0.85 mum; size 4 mum; thermal annealing; thick films; waveguide fabrication; Annealing; Glass; Nonlinear optics; Optical device fabrication; Optical films; Optical waveguides;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6193728