Title :
MEMS with Σ - Δ type of feedback loop control as an iterative map
Author :
Pladys, Mathieu ; Blokhina, Elena
Author_Institution :
Dept. de Genie Electr. et Inf., Inst. Nat. des Sci. Appl. de Toulouse, Toulouse, France
Abstract :
In this work, we consider a system that consists of a microresonator and a Σ Δ type feedback loop control which is typically a part of inertial sensors. We describe this architecture as a dynamical system (an iterative difference equation) in the time domain in order to study possible periodic solutions in the output.
Keywords :
difference equations; iterative methods; microcavities; micromechanical resonators; microsensors; sigma-delta modulation; time-domain analysis; ΣΔ type feedback loop control; MEMS; dynamical system; inertial sensor; iterative difference equation; iterative map; microresonator; time domain analysis; Accelerometers; Equations; Force; Micromechanical devices; Oscillators; Sensors; Topology;
Conference_Titel :
Circuits and Systems (ISCAS), 2011 IEEE International Symposium on
Conference_Location :
Rio de Janeiro
Print_ISBN :
978-1-4244-9473-6
Electronic_ISBN :
0271-4302
DOI :
10.1109/ISCAS.2011.5937731
