DocumentCode
1990785
Title
Direct laser writing with a slit-beam dynamically controlled with a phase spatial light modulator
Author
Cumming, Benjamin P. ; Gu, Min
Author_Institution
Centre for Micro-Photonics & CUDOS, Swinburne Univ. of Technol., Hawthorn, VIC, Australia
fYear
2011
fDate
Aug. 28 2011-Sept. 1 2011
Firstpage
1691
Lastpage
1692
Abstract
We present the use of a spatial light modulator operating as a phase modulator to create a dynamic slit at the pupil plane of the objective. The dynamic updating of the slit size, shape, position and angle allows for the aspect ratio improving slit method to be applied to more complex structures beyond straight waveguides and channels and to higher numerical aperture objectives that possess lateral asymmetry due to depolarization effects.
Keywords
laser beam machining; optical fabrication; optical waveguides; phase modulation; spatial light modulators; direct laser writing; dynamic slit; phase modulator; pupil plane; slit beam; spatial light modulator; Apertures; Laser beams; Optical device fabrication; Phase modulation; Shape; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location
Sydney, NSW
Print_ISBN
978-1-4577-1939-4
Type
conf
DOI
10.1109/IQEC-CLEO.2011.6193977
Filename
6193977
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