Resonant LGS microsensor for scanning microdeformation microscopy

Scanning microdeformation microscopy (SMM) is a near field microscopy in the mesoscopic domain. Such a microscope has become an alternative to the high resolution acoustic microscope that operates at very high frequencies. SMM is based on a vibrating contact tip and piezoelectric detection. The lateral resolution is essentially related to the tip diameter. Classically, the SMM sensor is obtained by a complex mounting process. The tip is glued on a Si cantilever driven by a piezoelectric ceramic. Piezoelectric crystal is an alternative to get a monolithic vibrating cantilever. Quartz crystal, which is the most often used piezoelectric material, can be advantageously replaced by Langasite crystal because of its higher piezoelectric coefficients and its better temperature behaviour.