DocumentCode

1995665

Title

Highly localized optical diagnostics of thin film processing

Author

Herman, Irving P.

Author_Institution

Columbia University

fYear

1992

fDate

16-19 Nov. 1992

Firstpage

15

Lastpage

16

Keywords

Copper; Etching; Gas lasers; Optical films; Probes; Raman scattering; Silicon; Surface emitting lasers; Surface morphology; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-0526-4

Type

conf

DOI

10.1109/LEOS.1992.693821

Filename

693821