DocumentCode :
2004463
Title :
Assembly and preliminary testing of the prototype 650 GHz BWO
Author :
Dayton, James A., Jr. ; Mearini, Gerald T. ; Kory, Carol L. ; Malta, Dean ; Lueck, Matthew ; Tabeling, Joseph W. ; Worthington, Scott ; Holland, Christopher ; Spindt, Charles
Author_Institution :
Teraphysics, Corp., Cleveland, OH
fYear :
2008
fDate :
22-24 April 2008
Firstpage :
394
Lastpage :
395
Abstract :
Approximately twenty intricate diamond structures have been fabricated, selectively metallized and assembled into prototype 650 GHz backward wave oscillators (BWOs). The chemical vapor deposition (CVD) diamond structure is grown into a silicon mold fabricated using deep reactive ion etching. The lithographic fabrication processes employed produce dozens of devices from each lot. The RF power generated is radiated directly from the BWO for compatibility with a quasi-optical sub-mm system. The interdigital slow wave circuit, the electron gun, the output coupler and the antenna are fabricated as a single piece of diamond to eliminate difficulties with alignment. We will describe the processes of fabrication and assembly, and present available preliminary results of prototype testing.
Keywords :
CVD coatings; backward wave oscillators; diamond; slow wave structures; sputter etching; BWO; antenna; backward wave oscillators; chemical vapor deposition diamond structure; deep reactive ion etching; electron gun; frequency 650 GHz; interdigital slow wave circuit; intricate diamond structures; lithographic fabrication process; output coupler; prototype testing; Assembly; Chemical vapor deposition; Etching; Fabrication; Metallization; Oscillators; Prototypes; Radio frequency; Silicon; Testing; BWO; CVD diamond; DRIE; THz; micro fabrication; sub-mm wavelength;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics Conference, 2008. IVEC 2008. IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-1715-5
Type :
conf
DOI :
10.1109/IVELEC.2008.4556365
Filename :
4556365
Link To Document :
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