DocumentCode
2006975
Title
Voltage and Temperature Dependence of Interface Trap Generation by Hot Electrons in P- and N- Poly Gated MOSFETs
Author
Hsu, C.C.-H. ; Ning, T.H.
Author_Institution
IBM Research Div., T.J. Watson Research Center, NY
fYear
1991
fDate
28-30 May 1991
Firstpage
17
Lastpage
18
Keywords
Annealing; Charge carrier processes; Electron traps; MOSFET circuits; Secondary generated hot electron injection; Silicon; Stress; Temperature dependence; Threshold voltage; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location
Oiso, Japan
Type
conf
DOI
10.1109/VLSIT.1991.705968
Filename
705968
Link To Document