• DocumentCode
    2008305
  • Title

    Navigation grade MEMS accelerometer

  • Author

    Zwahlen, Pascal ; Nguyen, Anne-Marie ; Dong, Yufeng ; Rudolf, Felix ; Pastre, Marc ; Schmid, Hanspeter

  • fYear
    2010
  • fDate
    24-28 Jan. 2010
  • Firstpage
    631
  • Lastpage
    634
  • Abstract
    This paper reports on a high performance navigation grade MEMS servo accelerometer targeted at inertial applications. Reported results are for a bulk MEMS capacitive sensor with 11g full scale over a 300 Hz bandwidth interfaced with a highly optimized servo-loop 5th-order sigma-delta electronic. Measurements demonstrate a long-term bias stability of +/-0.2mg, a second order non-linearity K2 < 5 ¿g/g2, an in-band noise floor of 1 ¿g/¿Hz and a Dynamic Range over 1 Hz bandwidth of 22 bits.
  • Keywords
    accelerometers; capacitive sensors; inertial navigation; microsensors; MEMS capacitive sensor; bandwidth; frequency 300 Hz; in-band noise floor; inertial applications; long-term bias stability; navigation grade MEMS servo accelerometer; second order non-linearity; servo-loop 5th-order sigma-delta electronic; Accelerometers; Bandwidth; Capacitive sensors; Delta-sigma modulation; Dynamic range; Micromechanical devices; Navigation; Noise measurement; Servomechanisms; Stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
  • Conference_Location
    Wanchai, Hong Kong
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-5761-8
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2010.5442327
  • Filename
    5442327