Fabrication and characterization of novel polymer composite microcantilever sensors for explosive detection

Author

Seena, V. ; Rajoriya, Anukool ; Fernandes, Avil ; Dhale, Karuna ; Pant, Prita ; Mukherji, Soumyo ; Rao, V. Ramgopal

Author_Institution

Indian Inst. Of Technol. Bombay, Mumbai, India

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

851

Lastpage

854

Abstract

In this paper, we report the development of a SU-8 based novel polymer composite microcantilever sensor designed for surface stress measurements. Nanoindentation study was carried out for measuring the Young´s modulus of the polymer composite. A low cost process, optimized for fabrication of composite SU8 microcantilevers with thickness as small as 3 Â¿m is developed and characterized as part of this work. Further, this paper also demonstrates the application of this polymer composite cantilever for explosive detection with the appropriate surface coatings carried out on the polymer surface.

Keywords

Young´s modulus; cantilevers; explosives; insulating coatings; micromechanical devices; polymers; sensors; stress measurement; Young´s modulus; composite SU8 microcantilevers fabrication; explosive detection; nanoindentation study; polymer composite microcantilever sensors; polymer surface stress measurements; surface coatings; Capacitive sensors; Chemical and biological sensors; Coatings; Explosives; Fabrication; Optical sensors; Piezoresistance; Polymer films; Sensor phenomena and characterization; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442340

Filename

5442340